The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning

In this paper, we explore the potentialities of using ultrasound waves as a post-irradiation treatment after proton beam writing (PBW) patterning PTFE. To that end, 2-mm-thick foils PTFE were irradiated with 2.2 MeV protons an average current 50 pA. Straight line structures patterned on polymer 3.5 × μm2 focused beam. Post-irradiation polymers placed in heat bath at 60 °C and immersed either distilled water or 6 M solution NaOH under action 40 kHz for developing structures. The results indicate submitted to is very efficient removing rough created by irradiation thus providing good aspect ratio PBW microstructures. On other hand, use instead did not improve quality are discussed terms parameters characterize interaction liquid media polymer.